Plasma Module

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The Plasma Module can be used to model all types of non-nuclear plasma reactors including:

Inductively Coupled Plasmas (ICP)
Capacitively Coupled Plasmas (CCP)
Microwave plasmas
DC discharges

Detailed circuit schematics can be included in the model via the circuit editor in the AC/DC or RF Modules. Predefined multiphysics couplings for the most common types of reactors simplifies the modeling process by automatically implementing the complicated coupling between the different physics.

Application Examples:

Lighting
Semiconductor processing
Medical cleaning and sterilization
Reactive gas generation
Propulsion devices
Plasma torches

Source: comsol.eu